Country for PR: United States
Contributor: PR Newswire New York
Tuesday, November 02 2021 - 10:00
AsiaNet
Axcelis Announces Introduction Of The 'GSD Ovation' High Current And High Energy Batch Implanters
BEVERLY, Mass., Nov. 2, 2021 /PRNewswire-AsiaNet/ --

     -- New Configuration Designed to Support the Surging 200mm Market

Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, 
high-productivity solutions for the semiconductor industry, announced today the 
introduction of the GSD Ovation(TM) high current and high energy batch 
implanters. Based on the highly successful GSD Series of implanters, the 
industry benchmark for the longest manufactured and supported batch ion 
implanter, the new GSD Ovation systems are designed to support the growing 
200mm new fab construction and expansion activity. 

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President and CEO Mary Puma commented, "Since 2015, 200mm fab construction and 
expansion has been surging, resulting in a shortage of new and used 200mm 
equipment. This growth in 200mm IC production is unprecedented. Axcelis is 
committed to support this significant demand, by providing an evolutionary 
batch configuration designed to seamlessly integrate with our installed base as 
well as provide new 200mm fabs with the industry's best 200mm batch implant 
solution."

Executive Vice President of Product Development, Bill Bintz, added, "The new 
GSD Ovation family further strengthens Axcelis' market leadership position, as 
the tool of record for 200mm fabs. Innovative improvements, combined with a 
proactive continuous improvement roadmap, enables the fastest and most cost 
effective way to extend, optimize and sustain robust capability, while 
delivering unmatched reliability and lowest cost of ownership. The product line 
includes a variety of implanters allowing customers to select the optimal 
energy range for their batch implant process, including: the GSD/E2 Ovation for 
general high current applications, and for high energy applications, the GSD/HE 
Ovation with energies up to 3 MeV, and the GSD/VHE Ovation with energies up to 
4.9 MeV." 

About Axcelis: 
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing 
innovative, high-productivity solutions for the semiconductor industry for over 
40 years. Axcelis is dedicated to developing enabling process applications 
through the design, manufacture and complete life cycle support of ion 
implantation systems, one of the most critical and enabling steps in the IC 
manufacturing process. Learn more about Axcelis at www.axcelis.com.  

CONTACTS: 

Maureen Hart (editorial/media) 978.787.4266 
Doug Lawson (investor relations) 978.787.9552


SOURCE  Axcelis Technologies, Inc.
 
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