Country for PR: United Kingdom
Contributor: PR Newswire Europe
Tuesday, May 24 2022 - 18:33
AsiaNet
ERS electronic introduces ProbeSense(TM), a state-of-the-art measurement device for automated temperature calibration in wafer test
MUNICH, May 24, 2022 /PRNewswire-AsiaNet/--

    ERS electronic [https://www.ers-gmbh.com/], the industry leader in the 
market of thermal management solutions for semiconductor manufacturing, has 
developed a temperature calibration device that allows automatic and highly 
accurate measurements below 30mK in the actual probing area.

    The patent-pending device, aptly named ProbeSense(TM) 
[https://www.ers-gmbh.com/thermal-chucks/probesense], consists of a temperature 
sensor, which is mounted in the probe card position on the prober. Taking 
advantage of the XYZ axis motion capability of the prober, the sensor can 
measure the temperature over several points on the wafer surface in the same 
conditions as during wafer probing. ProbeSense(TM) is delivered with adapter 
plates to fit your prober of choice and is thereby compatible with all wafer 
probers in the semiconductor industry. Included in the ProbeSense(TM) package 
is also a temperature measurement instrument, which has been calibrated 
together with the sensor in the mK range.

    By integrating ERS's ProbeSense(TM) software in the prober, the process can 
be fully automated, allowing a test script to be run for multiple points and at 
multiple temperatures on the chuck without the need for an operator. MPI 
Corporation [https://www.mpi-corporation.com/] is the first prober manufacturer 
offering this add-on function in its probing stations.

    "ProbeSense(TM) addresses the need for a robust, highly accurate, and 
easy-to-use calibration tool," says Klemens Reitinger, CTO of ERS electronic. 
"We believe that the automation capability, which is in the process of being 
integrated by several prober manufacturers, will be a game-changer when it 
comes to accuracy calibration and temperature uniformity measurement."

    "MPI Corporation sees a clear benefit of integrating ProbeSense(TM) for 
thermal chuck calibration into SENTIO(R) Prober control Software Suite. The 
fully automated procedure provides intuitive operation and fast results by 
utilizing the night or the weekend for calibration, thereby eliminating the 
need to sacrifice valuable test time", says Stojan Kanev, General Manager of 
Advanced Semiconductor Test at MPI Corporation. "By offering this capability to 
our customers, we are addressing their demand for a cost- and time-efficient 
thermal calibration solution."

    ERS's ProbeSense(TM) is available to order now.

    About ERS:

    ERS electronic GmbH, based around Munich, has been producing innovative 
thermal test solutions for the industry for more than 50 years. The company has 
gained an outstanding reputation in the sector, notably with its fast and 
accurate air cool-based thermal chuck systems for test temperatures ranging 
from -65°C to +550°C for analytical, parameter-related, and manufacturing tests.

    Video: https://www.youtube.com/watch?v=YuJksH8uOQY
    Logo: https://mma.prnewswire.com/media/1801970/ERS_electronic_GmbH_Logo.jpg

    Source - 'ERS electronic GmbH'
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