Country for PR: United States
Contributor: PR Newswire New York
Wednesday, August 31 2022 - 10:00
AsiaNet
EV Group Expands Collaboration with ITRI on Heterogeneous Integration Process Development
ST. FLORIAN, Austria, Aug. 31, 2022 /PRNewswire-AsiaNet/ --

EV Group (EVG), a leading supplier of wafer bonding and lithography equipment 
for the MEMS, nanotechnology and semiconductor markets, today announced that it 
has expanded its collaboration with the Industrial Technology Research 
Institute (ITRI), one of the world's leading applied technology research 
institutes based in Hsinchu, Taiwan, on developing advanced heterogeneous 
integration processes.

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With the support of the Department of Industrial Technology (DoIT) of the 
Ministry of Economic Affairs (MOEA), Taiwan, ITRI established the Heterogeneous 
Integration Chip-let System Package Alliance (Hi-CHIP) to help create an 
ecosystem covering package design, testing and verification, and pilot 
production, to achieve the goal of supply chain localization and expand 
business opportunities. As a member of the Hi-CHIP Alliance, EVG has provided 
several of its most advanced wafer bonding and lithography systems, including 
the LITHOSCALE(R) maskless exposure lithography system, EVG(R)850 DB automated 
debonding system, and GEMINI(R)FB hybrid bonding system. The installation of 
these high-volume-manufacturing platforms at ITRI's state-of-the-art facility 
will help enable EVG's and ITRI's shared customers to accelerate the 
development and transfer of new heterogeneous integration processes from R&D to 
customers' fabs.

In semiconductor manufacturing, 3D vertical stacking and heterogeneous 
integration – the manufacturing, assembly and packaging of multiple different 
components and dies into a single device or package – are increasingly 
important for higher performance beyond transistor scaling. 3D and 
heterogeneous integration are enabling high-bandwidth interconnects in advanced 
packaging to achieve overall system performance gains, and thus have become a 
crucial driver for artificial intelligence (AI), autonomous driving and other 
high-performance computing applications. As a result, the MOEA is proactively 
following up and bridging the resources with national-scale R&D projects such 
as "AI Chip Heterogeneous Integrated Module Advanced Manufacturing Platform" 
and "Programmable Heterogeneous 3D Integration".

According to Dr. Robert (Wei-Chung) Lo, Deputy General Director of Electronic 
and Optoelectronic System Research Laboratories at ITRI, "As part of ITRI's 
mission to drive industrial development, create economic value, and enhance 
social well-being through technology R&D, we focused on developing new 3D and 
heterogeneous chip integration processes and forging close cooperation across 
the supply chain to enable continued development and growth of the 
semiconductor industry. Having the same fully automated 
high-volume-manufacturing systems in our research facility that our customers 
have in their fabs, including these new wafer bonding and lithography solutions 
from EV Group, enables our customers to immediately transfer process recipes 
developed at ITRI to their own fabs – providing short ramp-up time from lab to 
fab."

"Key to our Triple-i philosophy of invent-innovate-implement is our focus on 
engaging with world-leading research institutes, like ITRI, to accelerate the 
development and commercialization of new technologies that drive future 
innovations in the semiconductor industry," stated Hermann Waltl, executive 
sales and customer support director and member of the executive board at EV 
Group. "Our ongoing collaboration with ITRI gives us access to world-class 
research expertise and further enhances our process support infrastructure in 
Taiwan, which EVG has significantly expanded over the years to better meet the 
growing needs and challenges that our customers and partners in the region 
face. This includes our exceptional process and application engineering team 
based in multiple locations across Taiwan, which complements the services 
provided at EVG's Heterogeneous Integration Competence Center at our 
headquarters in Austria."

About ITRI

Industrial Technology Research Institute (ITRI) is one of the world's leading 
technology R&D institutions aiming to innovate a better future for society. 
Founded in 1973, ITRI has played a vital role in transforming Taiwan's 
industries from labor-intensive into innovation-driven. To address market needs 
and global trends, it has launched its 2030 Technology Strategy & Roadmap and 
focuses on innovation development in Smart Living, Quality Health, and 
Sustainable Environment. It also strives to strengthen Intelligentization 
Enabling Technology to support diversified applications.

Over the years, ITRI has been dedicated to incubating startups and spinoffs, 
including well-known names such as UMC and TSMC. In addition to its 
headquarters in Taiwan, ITRI has branch offices in the U.S., Europe, and Japan 
in an effort to extend its R&D scope and promote international cooperation 
across the globe. For more information, please visit 
https://www.itri.org.tw/english/.

About EV Group (EVG)

EV Group (EVG) is a leading supplier of equipment and process solutions for the 
manufacture of semiconductors, microelectromechanical systems (MEMS), compound 
semiconductors, power devices and nanotechnology devices. Key products include 
wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) 
and metrology equipment, as well as photoresist coaters, cleaners and 
inspection systems. Founded in 1980, EV Group services and supports an 
elaborate network of global customers and partners all over the world. More 
information about EVG is available at www.EVGroup.com.

Contacts:
Clemens Schutte                             David Moreno
Director, Marketing and Communications      Principal
EV Group                                    Open Sky Communications
Tel: +43 7712 5311 0                        Tel: +1.415.519.3915
E-mail: Marketing@EVGroup.com               E-mail: dmoreno@openskypr.com

SOURCE EV Group
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