New Product Line Extension Features Enabling Technology for Image Sensor Market


Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, 
high-productivity solutions for the semiconductor industry, announced today the 
successful qualification of a Purion XEmax(TM) high energy ion implant system 
for production at a leading CMOS image sensor manufacturer.

President and CEO Mary Puma commented, "We're pleased to have enhanced this 
customer's next generation image sensor technology development and 
manufacturing capabilities. We are excited that growth in the image sensor 
market, combined with Purion XEmax systems at multiple customer sites, will 
further expand this tool's footprint and fuel Purion Platform growth."


The Purion XEmax:

The new Purion XEmax high energy implanter was designed for emerging, high 
performance image sensor applications. The enhanced beamline features multiple 
filtration systems to eliminate energetic metal contaminants which can 
otherwise result in compromised dark current and white pixel count levels. The 
system is built on the industry leading Purion XE high energy implant platform 
and features Axcelis' patented Boost Technology(TM), which delivers beam 
energies up to 15 MeV. With innovative technology, the Purion XEmax is 
delivering the tightest angle and overall process control to enable higher 
quality photodiode performance for next generation devices.


About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing 
innovative, high-productivity solutions for the semiconductor industry for over 
40 years. Axcelis is dedicated to developing enabling process applications 
through the design, manufacture and complete life cycle support ( 
https://c212.net/c/link/?t=0&l=en&o=3670915-1&h=2771478117&u=http%3A%2F%2Fwww.axcelis.com%2Fsupport-programs%2Fglobal-support-solutions&a=complete+life+cycle+support 
) of ion implantation ( 
https://c212.net/c/link/?t=0&l=en&o=3670915-1&h=1396724622&u=http%3A%2F%2Fwww.axcelis.com%2Fproducts%2Fion-implant&a=ion+implantation 
) systems, one of the most critical and enabling steps in the IC manufacturing 
process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:
Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE: Axcelis Technologies, Inc.